Browsing by Author Erlbacher, T.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| Oct-2010 | Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer area | Özyüzer, Gülnur Aygün; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L. |