Browsing by Author Pfitzner, L

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Issue DateTitleAuthor(s)
Feb-2011Determination of the Dill Parameters of Thick Positive Resist for Use in Modeling ApplicationsRoeder, G.; Liu, S.; Aygün, Gülnur ; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L