Browsing by Author Schellenberger, M.

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)
Feb-2011Determination of the Dill parameters of thick positive resist for use in modeling applicationsRoeder, G.; Liu, S.; Aygün, Gülnur ; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L
Oct-2010Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer areaÖzyüzer, Gülnur Aygün; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L.