Browsing by Author Schellenberger, M.
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
|---|---|---|
| Feb-2011 | Determination of the Dill parameters of thick positive resist for use in modeling applications | Roeder, G.; Liu, S.; Aygün, Gülnur ; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L |
| Oct-2010 | Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer area | Özyüzer, Gülnur Aygün; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L. |