Browsing by Author Wolf, M.

Showing results 1 to 1 of 1
Issue DateTitleAuthor(s)
Oct-2010Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin Sio2 layer on a large wafer areaAygün, Gülnur ; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L.