Browsing by Author Wolf, M.
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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Oct-2010 | Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin Sio2 layer on a large wafer area | Aygün, Gülnur ; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L. |