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01. Izmir Institute of Technology
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Subject
1
Magnetron sputtering
1
Terahertz (THz) waves
1
Thin films
1
Vanadium dioxide
Date issued
1
2020
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Master Thesis
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Author:
Ata, Bengü
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Dec-2020
The growth of vanadium dioxide thin films by magnetron sputtering technique and terahertz wave modulation characteristics
Ata, Bengü