04.05. Department of Pyhsics
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Issue Date | Title | Author(s) | |
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1 | Feb-2011 | Determination of the Dill parameters of thick positive resist for use in modeling applications | Roeder, G.; Liu, S.; Aygün, Gülnur ; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L |