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03.05. Department of Electrical and Electronics Engineering
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Subject
1
Electrostatic actuators
1
MEMS
1
Nonlinear control systems
Date issued
1
2011
Type
1
Conference Object
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Tatlıcıoğlu, Enver
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Author:
Bayrak, Alper
Author:
Salah, Mohammed H.
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Title
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1
2011
Filter-based control for parallel plate micro electrostatic actuators