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Title: Reactive ion beam etching of superconducting Bi2212 by Ta/PR and PR'/Ta/PR masks for the generation of THz waves
Authors: Köseoğlu, Hasan
Türkoğlu, Fulya
Demirhan, Yasemin
Meriç Polster, Zeynep
Özyüzer, Lütfi
Issue Date: 2009
Publisher: Institute of Electrical and Electronics Engineers Inc.
Abstract: Generation of powerful THz radiation from intrinsic Josephson Junctions (Ills) of Bi(2)Sr(2)CaCu(2)O(8+delta) (Bi2212) may require mesas with large lateral dimension. However, there are difficulties in fabrication of perfect rectangular mesas. Mesa lateral angles should be close to 90 degrees to obtain IJJs with same planar dimensions for synchronization of IJJs. Since thick photoresist (PR) layer shades the lateral dimension of mesa during ion beam etching, we patterned Ta/PR and PR'/Ta/PR masks on Bi2212 and used selective ion etching to overcome this problem. The reactive ion beam etchings have done with ion beam of Ar, N(2) and O(2) and we have obtained mesas about 1 mu m with lateral angle of approximately 50 to 75 degrees which is better than the mesas fabricated with single layer mask.
Description: Proceedings - TERA-MIR 2009, NATO Advanced Research Workshop Terahertz and Mid Infrared Radiation: Basic Research and Practical Applications
ISBN: 978-1-4244-3848-8
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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