Please use this identifier to cite or link to this item:
https://hdl.handle.net/11147/2220
Title: | Diffusion length measurements of microcrystalline silicon thin films prepared by hot-wire/catalytic chemical vapor deposition (HWCVD) | Authors: | Okur, Salih Güneş, Mehmet Finger, Friedhelm Carius, Reinhard |
Keywords: | Thin films Diffusion length Hot-wire/catalytic chemical vapor deposition Raman spectroscopy |
Publisher: | Elsevier Ltd. | Source: | Okur, S., Güneş, M., Finger, F., and Carius, R. (2006). Diffusion length measurements of microcrystalline silicon thin films prepared by hot-wire/catalytic chemical vapor deposition (HWCVD). Thin Solid Films, 501(1-2), 137-140. doi:10.1016/j.tsf.2005.07.141 | Abstract: | Hydrogenated microcrystalline silicon (μc-Si:H) films prepared by using the hot-wire/catalytic chemical vapor deposition (HWCVD) technique at low substrate temperatures between 185 °C and 220 °C with different silane concentrations (SC) were investigated using steady-state photocarrier grating (SSPG) and the steady-state photoconductivity methods (SSPC). Crystalline volume fractions (IC RS) obtained from Raman spectroscopy change from 0.22 to 0.77. The diffusion length (LD) is measured at generation rates between G = 1019 and 1021 cm- 3 s- 1. LD changes from 27 nm to 270 nm, with maximum values around SC = 5%. The dependence of LD on SC is similar to that observed for similar quality microcrystalline silicon films prepared using the VHF-PECVD technique. The grating quality factor, γ0, drops from about 0.9 to 0.5 after transition to the microcrystalline regime as indication of scattering from surface patterns. | Description: | Proceedings of the Third International Conference on Hot-Wire; 23 August 2004 through 27 August 2004 | URI: | http://doi.org/10.1016/j.tsf.2005.07.141 http://hdl.handle.net/11147/2220 |
ISSN: | 0040-6090 0040-6090 |
Appears in Collections: | Physics / Fizik Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
Show full item record
CORE Recommender
SCOPUSTM
Citations
9
checked on Sep 1, 2024
WEB OF SCIENCETM
Citations
8
checked on Aug 24, 2024
Page view(s)
314
checked on Sep 2, 2024
Download(s)
254
checked on Sep 2, 2024
Google ScholarTM
Check
Altmetric
Items in GCRIS Repository are protected by copyright, with all rights reserved, unless otherwise indicated.