Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/2235
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dc.contributor.authorAtanassova, Elenada A.-
dc.contributor.authorAygün, Gülnur-
dc.contributor.authorTuran, Raşit-
dc.contributor.authorBabeva, T.-
dc.date.accessioned2016-10-13T13:35:18Z
dc.date.available2016-10-13T13:35:18Z
dc.date.issued2006-03
dc.identifier.citationAtanassova, E. A., Aygün, G., Turan, R., and Babeva, T. (2006). Structural and optical characteristics of tantalum oxide grown by pulsed Nd:YAG laser oxidation. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 24(2), 206-211. doi:10.1116/1.2165656en_US
dc.identifier.issn0734-2101
dc.identifier.issn0734-2101-
dc.identifier.issn1520-8559-
dc.identifier.urihttp://doi.org/10.1116/1.2165656
dc.identifier.urihttp://hdl.handle.net/11147/2235
dc.description.abstractTantalum pentoxide (Ta2 O5) thin films (20-50 nm) have been grown by 1064 nm Nd:YAG laser oxidation of Ta film deposited on Si. The chemical bonding, structure, and optical properties of the films have been studied by Fourier transform infrared spectroscopy, x-ray diffraction, and reflectance measurements at normal light incidence in the spectral range of 350-800 nm. The effect of the substrate temperature (250-400 °C) during oxidation and its optimization with respect to the used laser beam energy density (3.2-3.4 J cm2 per pulse) is discussed. It is established that the substrate temperature is a critical factor for the effectiveness of the oxidation process and can be used to control the composition and amorphous status of the films. The film density explored by refractive index is improved with increasing film thickness. The refractive index of the layers grown under the higher laser beam energy density and at substrate temperature of 350-400 °C was found to be close to the value of bulk Ta2 O5. The films are amorphous at substrate temperature below 350 °C and possessed an orthorhombic (Β- Ta2 O5) crystal structure at higher temperatures. The thinner layers crystallize at a little higher temperature.en_US
dc.description.sponsorshipBulgarian National Science Foundation Project No. F1508 and TÜBİTAK Project No. TBAG/U68en_US
dc.language.isoenen_US
dc.publisherAVS Science and Technology Societyen_US
dc.relation.ispartofJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Filmsen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectThin filmsen_US
dc.subjectAmorphous materialsen_US
dc.subjectBondingen_US
dc.subjectCrystal structureen_US
dc.subjectCrystallizationen_US
dc.subjectReflectance measurementsen_US
dc.titleStructural and optical characteristics of tantalum oxide grown by pulsed Nd:YAG laser oxidationen_US
dc.typeArticleen_US
dc.authoridTR39698en_US
dc.institutionauthorAygün, Gülnur-
dc.departmentİzmir Institute of Technology. Physicsen_US
dc.identifier.volume24en_US
dc.identifier.issue2en_US
dc.identifier.startpage206en_US
dc.identifier.endpage211en_US
dc.identifier.wosWOS:000236234600007en_US
dc.identifier.scopus2-s2.0-33644545097en_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.identifier.doi10.1116/1.2165656-
dc.relation.doi10.1116/1.2165656en_US
dc.coverage.doi10.1116/1.2165656en_US
dc.identifier.wosqualityQ2-
dc.identifier.scopusqualityQ1-
item.fulltextWith Fulltext-
item.openairetypeArticle-
item.cerifentitytypePublications-
item.grantfulltextopen-
item.languageiso639-1en-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
crisitem.author.dept04.05. Department of Pyhsics-
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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