Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/2765
Title: The fabrication of THz emitting mesas by reactive ion-beam etching of superconducting Bi2212 with multilayer masks
Authors: Köseoğlu, Hasan
Türkoğlu, Fulya
Şimşek, Yılmaz
Özyüzer, Lütfi
Keywords: Reactive ion-beam etching
Intrinsic Josephson junctions
Terahertz radiation
Bi2212
Issue Date: Jan-2011
Publisher: Springer Verlag
Source: Köseoğlu, H., Türkoğlu, F., Şimşek, Y., and Özyüzer, L. (2011). The fabrication of THz emitting mesas by reactive ion-beam etching of superconducting Bi2212 with multilayer masks. Journal of Superconductivity and Novel Magnetism, 24:1,1083-1086. doi:10.1007/s10948-010-0859-9.
Abstract: Generation of powerful THz radiation from intrinsic Josephson Junctions (IJJs) of Bi2Sr2CaCu2O8+δ (Bi2212) may require mesas with large lateral dimensions. However, there are difficulties in fabrication of perfect rectangular mesas. The lateral angles of mesas should be close to 90 degrees to obtain IJJs with same planar dimensions for synchronization of IJJs. We patterned Ta/photoresist and photoresist/Ta/photoresist masks on Bi2212 and used selectiveionetchingtoovercomethethickphotoresistlayershading on the lateral dimension of mesa during the ion-beam etching. The reactive ion-beam etchings have been done with ion beams of Ar, N2 and O2, and we have obtained mesas about 1 µm with lateral angle of approximately 50 to 75°, which is better than the mesas fabricated with photoresist mask.
URI: http://doi.org/10.1007/s10948-010-0859-9
http://hdl.handle.net/11147/2765
ISSN: 1557-1947
1557-1947
1557-1939
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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