Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/4674
Full metadata record
DC FieldValueLanguage
dc.contributor.authorGüneş, Mehmet-
dc.contributor.authorJohanson, Robert E.-
dc.contributor.authorKasap, Safa O.-
dc.contributor.authorFinger, Friedhelm-
dc.contributor.authorLambertz, Andreas-
dc.date.accessioned2016-05-27T12:25:55Z
dc.date.available2016-05-27T12:25:55Z
dc.date.issued2003-10
dc.identifier.citationGüneş, M., Johanson, R. E., Kasap, S. O., Finger, F., and Lambertz, A. (2003). Conductance fluctuations in VHF-PECVD grown hydrogenated microcrystalline silicon thin films. Journal of Materials Science: Materials in Electronics, 14(10-12), 731-732. doi:10.1023/A:1026199608881en_US
dc.identifier.issn0957-4522
dc.identifier.issn0957-4522-
dc.identifier.urihttp://doi.org/10.1023/A:1026199608881
dc.identifier.urihttp://hdl.handle.net/11147/4674
dc.description.abstractCoplanar conductance fluctuations or excess noise of undoped hydrogenated microcrystal-line silicon (μc-Si : H) thin films grown by VHF-PECVD from silane-hydrogen mixtures with silane concentrations from 2% to 6% have been studied between room temperature and 470 K. We report that undoped μc-Si : H thin films show similar noise-power spectra to those of undoped a-Si : H films in a coplanar sample geometry. At lower temperatures, the noise with the slope α = 0.60 ± 0.07 and at higher temperatures, the noise with the slope α close to unity dominate the spectrum. The noise magnitude decreases with decreasing silane concentration and becomes strongly temperature dependent with increased crystal unity.en_US
dc.description.sponsorshipTÜBİTAK and NSECRen_US
dc.language.isoenen_US
dc.publisherSpringer Verlagen_US
dc.relation.ispartofJournal of Materials Science: Materials in Electronicsen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectThin filmsen_US
dc.subjectCoplanar conductanceen_US
dc.subjectCrystalline materialsen_US
dc.subjectHydrogenationen_US
dc.subjectPlasma enhanced chemical vapor depositionen_US
dc.subjectSiliconen_US
dc.titleConductance fluctuations in VHF-PECVD grown hydrogenated microcrystalline silicon thin filmsen_US
dc.typeConference Objecten_US
dc.authoridTR1299en_US
dc.institutionauthorGüneş, Mehmet-
dc.departmentİzmir Institute of Technology. Physicsen_US
dc.identifier.volume14en_US
dc.identifier.issue10-12en_US
dc.identifier.startpage731en_US
dc.identifier.endpage732en_US
dc.identifier.wosWOS:000185962400031en_US
dc.identifier.scopus2-s2.0-0242285610en_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.identifier.doi10.1023/A:1026199608881-
dc.relation.doi10.1023/A:1026199608881en_US
dc.coverage.doi10.1023/A:1026199608881en_US
local.message.claim2022-06-16T11:18:52.542+0300|||rp01576|||submit_approve|||dc_contributor_author|||None*
dc.identifier.wosqualityQ3-
dc.identifier.scopusqualityQ2-
item.openairetypeConference Object-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextWith Fulltext-
item.languageiso639-1en-
item.cerifentitytypePublications-
item.grantfulltextopen-
crisitem.author.dept04.05. Department of Pyhsics-
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
Files in This Item:
File Description SizeFormat 
4674.pdfConference Paper234.91 kBAdobe PDFThumbnail
View/Open
Show simple item record



CORE Recommender

SCOPUSTM   
Citations

1
checked on Mar 22, 2024

WEB OF SCIENCETM
Citations

1
checked on Mar 27, 2024

Page view(s)

166
checked on Mar 25, 2024

Download(s)

134
checked on Mar 25, 2024

Google ScholarTM

Check




Altmetric


Items in GCRIS Repository are protected by copyright, with all rights reserved, unless otherwise indicated.