Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/5013
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dc.contributor.authorSalah, Mohammed H.-
dc.contributor.authorAl-Jarrah, Ahmad M.-
dc.contributor.authorTatlıcıoğlu, Enver-
dc.date.accessioned2017-03-08T13:33:41Z-
dc.date.available2017-03-08T13:33:41Z-
dc.date.issued2011-
dc.identifier.citationSalah, M. H., Al-Jarrah, A. M., and Tatlıcıoğlu, E. (2011, June 1-3). Nonlinear control techniques for micro electrostatic actuators in the presence of parasitics and parametric uncertainties. In Proceedings of the 13th IASTED International Conference on Control and Applications. doi:10.2316/P.2011.729-105en_US
dc.identifier.urihttp://doi.org/10.2316/P.2011.729-105-
dc.identifier.urihttp://hdl.handle.net/11147/5013-
dc.description13th IASTED International Conference on Control and Applications, CA 2011; Vancouver, BC; Canada; 1 June 2011 through 3 June 2011en_US
dc.description.abstractIn this paper, nonlinear control techniques are developed to control parallel-plate micro electrostatic actuators in the presence of parasitics and parametric uncertainties. The movable plate of the micro actuator is actively controlled utilizing the measurements of internal charge and movable plate's displacement. A velocity observer is designed to estimate the velocity of the plate that is needed for the control algorithm since it is difficult to be measured practically. The proposed backstepping nonlinear control strategies are developed based on a Lyapunov-based analysis, which proves that the desired plate's displacement can be obtained accurately. The proposed nonlinear controllers are capable of controlling the movable plate beyond the pull-in limit in the presence of parametric uncertainties. Representative numerical simulations are presented to demonstrate the performance of the developed nonlinear control strategies in accurately tracking desired deflections of the movable plate within the entire capacitive gap. Finally, a comprehensive performance comparison is performed to examine the effectiveness of the control designs.en_US
dc.language.isoenen_US
dc.publisherACTA Pressen_US
dc.relation.ispartof13th IASTED International Conference on Control and Applications, CA 2011en_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectElectrostatic actuatorsen_US
dc.subjectNonlinear control systemsen_US
dc.subjectMEMSen_US
dc.subjectMicroactuatorsen_US
dc.subjectParametric uncertaintiesen_US
dc.titleNonlinear control techniques for micro electrostatic actuators in the presence of parasitics and parametric uncertaintiesen_US
dc.typeConference Objecten_US
dc.authoridTR123720en_US
dc.institutionauthorTatlıcıoğlu, Enver-
dc.departmentİzmir Institute of Technology. Electrical and Electronics Engineeringen_US
dc.identifier.startpage36en_US
dc.identifier.endpage41en_US
dc.identifier.scopus2-s2.0-80052158247en_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.identifier.doi10.2316/P.2011.729-105-
dc.relation.doi10.2316/P.2011.729-105en_US
dc.coverage.doi10.2316/P.2011.729-105en_US
item.grantfulltextopen-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.openairetypeConference Object-
item.languageiso639-1en-
item.fulltextWith Fulltext-
crisitem.author.dept03.05. Department of Electrical and Electronics Engineering-
Appears in Collections:Electrical - Electronic Engineering / Elektrik - Elektronik Mühendisliği
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
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