Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/5857
Title: Improvement of optical and electrical properties of ITO thin films by electro-annealing
Authors: Köseoğlu, Hasan
Türkoğlu, Fulya
Kurt, Metin
Yaman, Mutlu Devran
Akça, Fatime Gülşah
Aygün, Gülnur
Özyüzer, Lütfi
Keywords: Large area magnetron sputtering
Annealing
Thin films
Energy gap
ITO thin films
Issue Date: Oct-2015
Publisher: Elsevier Ltd.
Source: Köseoğlu, H., Türkoğlu, F., Kurt, M., Yaman, M. D., Akça, F. G., Aygün, G., and Özyüzer, L. (2015). Improvement of optical and electrical properties of ITO thin films by electro-annealing. Vacuum, 120, 8-13. doi:10.1016/j.vacuum.2015.06.027
Abstract: The effect of electro-annealing in vacuum and air on the optical and electrical properties of ITO thin films grown by large area DC magnetron sputtering was investigated. Moreover, the performances of the electro-annealed ITO thin films in vacuum and air were compared. Electro-annealing was performed by applying 0.75, 1.00, 1.25 and 1.50 A constant ac current to the ITO thin films. It was observed that the crystallinity of the films was better for the ITO thin films electro-annealed in vacuum. The changes in sheet resistance of electro-annealed ITO thin films with applied currents were detailed. The transmittance of the films increased for both electro-annealing in vacuum and air. A correlation between band-gap and resistivity for all of the electro-annealed thin films was observed.
URI: http://doi.org/10.1016/j.vacuum.2015.06.027
http://hdl.handle.net/11147/5857
ISSN: 0042-207X
0042-207X
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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