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https://hdl.handle.net/11147/6078
Title: | Surface roughness estimation of MBE grown CdTe/GaAs(211)B by ex-situ spectroscopic ellipsometry | Authors: | Karakaya, Merve Bilgilisoy, Elif Arı, Ozan Selamet, Yusuf |
Keywords: | Cadmium telluride Ellipsometry Optical correlation Surface roughness Spectroscopic ellipsometry |
Publisher: | American Institute of Physics | Source: | Karakaya, M., Bilgilisoy, E., Arı, O., and Selamet, Y. (2016). Surface roughness estimation of MBE grown CdTe/GaAs(211)B by ex-situ spectroscopic ellipsometry. AIP Advances, 6(7). doi:10.1063/1.4959223 | Abstract: | Spectroscopic ellipsometry (SE) ranging from 1.24 eV to 5.05 eV is used to obtain the film thickness and optical properties of high index (211) CdTe films. A three-layer optical model (oxide/CdTe/GaAs) was chosen for the ex-situ ellipsometric data analysis. Surface roughness cannot be determined by the optical model if oxide is included. We show that roughness can be accurately estimated, without any optical model, by utilizing the correlation between SE data (namely the imaginary part of the dielectric function, <ϵ2 > or phase angle, ψ) and atomic force microscopy (AFM) roughness. <ϵ2 > and ψ values at 3.31 eV, which corresponds to E1 critical transition energy of CdTe band structure, are chosen for the correlation since E1 gives higher resolution than the other critical transition energies. On the other hand, due to the anisotropic characteristic of (211) oriented CdTe surfaces, SE data (<ϵ2 > and ψ) shows varieties for different azimuthal angle measurements. For this reason, in order to estimate the surface roughness by considering these correlations, it is shown that SE measurements need to be taken at the same surface azimuthal angle. Estimating surface roughness in this manner is an accurate way to eliminate cumbersome surface roughness measurement by AFM. | URI: | http://doi.org/10.1063/1.4959223 http://hdl.handle.net/11147/6078 |
ISSN: | 2158-3226 2158-3226 |
Appears in Collections: | Materials Science and Engineering / Malzeme Bilimi ve Mühendisliği Physics / Fizik Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
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