Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/6516
Title: Scanning probe oxidation lithography on Ta thin films
Authors: Okur, Salih
Büyükköse, Serkan
Tarı, Süleyman
Keywords: Tantalum thin film
Electrical resistivity
Insulating thin films
Scanning probe lithography
Tantalum oxide
Issue Date: Nov-2008
Publisher: American Scientific Publishers
Source: Okur, S., Büyükköse, S., and Tarı, S. (2008). Scanning probe oxidation lithography on Ta thin films. Journal of Nanoscience and Nanotechnology, 8(11), 5640-5645. doi:10.1166/jnn.2008.324
Abstract: A Semi-Contact Scanning Probe Lithography Technique (SC-SPL) has been applied to create nano-oxide patterns on Ta thin films grown by DC magnetron sputtering method on SiO 2/Si substrates. The height and linewidth profiles of nano-oxide lines created by a conductive AFM tip on Ta film surfaces were measured as a function of applied voltage, oxidation time, humidity, and tip apex curvature. The AFM surface measurements show that the height of the oxides increases linearly with increasing voltage; but there was no oxide growth, when less than 4 V was applied even at 85% relative humidity. Electrical measurements were performed and the resistivities of the TaO x layer and Ta film were obtained as 5.76 × 10 8 and 1.4 × 10 5 Ohm-cm, respectively.
URI: http://doi.org/10.1166/jnn.2008.324
http://hdl.handle.net/11147/6516
ISSN: 1533-4880
1533-4899
1533-4880
Appears in Collections:Physics / Fizik
PubMed İndeksli Yayınlar Koleksiyonu / PubMed Indexed Publications Collection
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

Files in This Item:
File Description SizeFormat 
6516.pdfMakale5.73 MBAdobe PDFThumbnail
View/Open
Show full item record

CORE Recommender

Page view(s)

82
checked on Nov 28, 2022

Download(s)

194
checked on Nov 28, 2022

Google ScholarTM

Check


Items in GCRIS Repository are protected by copyright, with all rights reserved, unless otherwise indicated.