Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/6871
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dc.contributor.advisorEbil, Özgençen_US
dc.contributor.authorAteş, Selcan-
dc.date.accessioned2018-04-11T07:16:40Z-
dc.date.available2018-04-11T07:16:40Z-
dc.date.issued2017-12-
dc.identifier.citationAteş, S. (2017). Experimental and computational investigation of transport phenomena in initiated chemical vapor deposition (iCVD) process. Unpublished doctoral dissertation, Izmir Institute of Technology, Izmir, Turkeyen_US
dc.identifier.urihttp://hdl.handle.net/11147/6871-
dc.descriptionThesis (Doctoral)--Izmir Institute of Technology, Chemical Engineering, Izmir, 2017en_US
dc.descriptionFull text release delayed at author's request until 2021.01.17en_US
dc.descriptionIncludes bibliographical references (leaves: 84-86)en_US
dc.descriptionText in English; Abstract: Turkish and Englishen_US
dc.description.abstractAs a polymer thin-film deposition technique, initiated CVD (iCVD) is a heterogeneous process involving gas phase precursors and solid film formation on a solid/liquid substrates at different temperature regions. Obtaining fine-tuned film properties over different substrate geometries at different process conditions is a challenging tasks and requires experimental trials. The major goal of this study is to develop a computational model which describes all relevant transport phenomena occurring in iCVD process, and which is capable to predict the polymer film thickness at different deposition conditions for flat and/or non-flat substrates in a 3D reactor geometry. A Finite Element Analysis (FEA)-based 3D computational model, which can be applied to a variety number of iCVD reactor and substrate geometries, has been developed in the study. To validate the model, reported experimental conditions of 1H,1H,2H,2Hperfluorodecyl acrylate (PFDA) deposition with t-butyl peroxide (TBPO) initiator, and butyl acrylate (BA) deposition with t-amyl peroxide (TAPO) initiator, are applied to the model, respectively. The simulation results of both deposition processes show good agreement with experimental results reported in literature. Presented model successfully describes the relevant transport phenomena, and provides a priori predictions on polymerization rate, and film thickness on complex substrate geometries for a polymerization reaction with known kinetic data. For further studies, presented model can be modified or used as an approach for modeling of other types of CVD systems as well as facilitating process scale-up. The model can also extract valuable polymerization kinetics data provided that a sufficient number of experiments are performed at a specified substrate temperature, and process parameters and measured final film thicknesses are entered to the model.en_US
dc.format.extentxi, 95 leavesen_US
dc.language.isoenen_US
dc.publisherIzmir Institute of Technologyen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectiCVDen_US
dc.subjectPerfluorodecyl acrylateen_US
dc.subjectThin filmsen_US
dc.subjectPolymerizationen_US
dc.subjectComputer aided modellingen_US
dc.subjectChemical vapor depositionen_US
dc.titleExperimental and computational investigation of transport phenomena in initiated chemical vapor deposition (iCVD) processen_US
dc.title.alternativeBaşlatılmış kimyasal buhar biriktirme prosesinde taşınım işlemlerinin deneysel ve hesaplamalı incelenmesien_US
dc.typeDoctoral Thesisen_US
dc.institutionauthorAteş, Selcan-
dc.departmentThesis (Doctoral)--İzmir Institute of Technology, Chemical Engineeringen_US
dc.request.emailselcanates3@gmail.com-
dc.request.fullnameSelcan Ateş-
dc.relation.publicationcategoryTezen_US
item.openairetypeDoctoral Thesis-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextWith Fulltext-
item.languageiso639-1en-
item.cerifentitytypePublications-
item.grantfulltextopen-
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