Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/7567
Title: Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
Authors: Türkoğlu, Fulya
Köseoğlu, Hasan
Zeybek, S.
Özdemir, Mehtap
Özyüzer, Gülnur Aygün
Özyüzer, Lütfi
Keywords: Thin films
Aluminum coatings
Zinc oxide
Aluminum oxide
Sample holders
Issue Date: Apr-2018
Publisher: American Institute of Physics
Source: Türkoğlu, F., Köseoğlu, H., Zeybek, S., Özdemir, M., Aygün, G., and Özyüzer, L. (2018). Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering. Journal of Applied Physics, 123(16). doi:10.1063/1.5012883
Abstract: In this study, aluminum-doped zinc oxide (AZO) thin films were deposited by DC magnetron sputtering at room temperature. The distance between the substrate and target axis, and substrate rotation speed were varied to get high quality AZO thin films. The influences of these deposition parameters on the structural, optical, and electrical properties of the fabricated films were investigated by X-ray diffraction (XRD), Raman spectroscopy, spectrophotometry, and four-point probe techniques. The overall analysis revealed that both sample position and substrate rotation speed are effective in changing the optical, structural, and electrical properties of the AZO thin films. We further observed that stress in the films can be significantly reduced by off-center deposition and rotating the sample holder during the deposition. An average transmittance above 85% in the visible range and a resistivity of 2.02 × 10-3Ω cm were obtained for the AZO films.
URI: https://doi.org/10.1063/1.5012883
https://hdl.handle.net/11147/7567
ISSN: 0021-8979
0021-8979
1089-7550
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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