Characterization of Vo2 Films Grown by Magnetron Sputtering

Yüce, HürriyetAygün, GülnurÖzyüzer, LütfiKöklü, Mehtap2021-01-242021-01-242015978-1-4799-6974-6https://hdl.handle.net/11147/9934IEEE International Conference on Plasma Sciences (ICOPS)[No abstract available]eninfo:eu-repo/semantics/closedAccessCharacterization of Vo2 Films Grown by Magnetron SputteringConference Object