04.05. Department of Pyhsics

OrgUnit's Researchers publications
(Dept/Workgroup Publication)

Refined By:
Type:  Article
Author:  Aygün, Gülnur
Date Issued:  [2010 TO 2019]
Subject:  3D simulation

Results 1-1 of 1 (Search time: 0.002 seconds).

Issue DateTitleAuthor(s)
1May-2012Simulation of 3D inclined/rotated UV lithography and its application to microneedlesLiu, Shijie; Roeder, George; Aygün, Gülnur ; Motzek, Kristian; Evanschitzky, Peter; Erdmann, Andreas