Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/2235
Title: Structural and optical characteristics of tantalum oxide grown by pulsed Nd:YAG laser oxidation
Authors: Atanassova, Elenada A.
Aygün, Gülnur
Turan, Raşit
Babeva, T.
Keywords: Thin films
Amorphous materials
Bonding
Crystal structure
Crystallization
Reflectance measurements
Issue Date: Mar-2006
Publisher: AVS Science and Technology Society
Source: Atanassova, E. A., Aygün, G., Turan, R., and Babeva, T. (2006). Structural and optical characteristics of tantalum oxide grown by pulsed Nd:YAG laser oxidation. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 24(2), 206-211. doi:10.1116/1.2165656
Abstract: Tantalum pentoxide (Ta2 O5) thin films (20-50 nm) have been grown by 1064 nm Nd:YAG laser oxidation of Ta film deposited on Si. The chemical bonding, structure, and optical properties of the films have been studied by Fourier transform infrared spectroscopy, x-ray diffraction, and reflectance measurements at normal light incidence in the spectral range of 350-800 nm. The effect of the substrate temperature (250-400 °C) during oxidation and its optimization with respect to the used laser beam energy density (3.2-3.4 J cm2 per pulse) is discussed. It is established that the substrate temperature is a critical factor for the effectiveness of the oxidation process and can be used to control the composition and amorphous status of the films. The film density explored by refractive index is improved with increasing film thickness. The refractive index of the layers grown under the higher laser beam energy density and at substrate temperature of 350-400 °C was found to be close to the value of bulk Ta2 O5. The films are amorphous at substrate temperature below 350 °C and possessed an orthorhombic (Β- Ta2 O5) crystal structure at higher temperatures. The thinner layers crystallize at a little higher temperature.
URI: http://doi.org/10.1116/1.2165656
http://hdl.handle.net/11147/2235
ISSN: 0734-2101
0734-2101
1520-8559
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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